Product Detail
Sputter Ion Pump
Sputter Ion Pump
Detail

Interface flange: DN150CF

Pumping rate (L/S):

             On air: 120

             Ar: 1.2

The starting pressure is less than 5 * (Pa): 10-4

Ultimate pressure (Pa): 7 x 10-8

Baking temperature (C):

Magnet: 200

Without magnet: < 300

Operating voltage (KV): +7

Electrode unit (unit): 4

Weight (kg): 30

Length * width * height (mm): 350 x 250 x 307